Scanning probe lithography

Scanning probe lithography describe a set of lithographic methods, in which a microscopic or nanoscopic stylus is moved mechanically across a surface to form a pattern.

This type of method can be split in two different groups:

Constructive - In which the patterning is done by directly transferring chemical species to the surface (Dip Pen Nanolithography)

Destructive - In which the patterning is done by providing the substrate with energy (Either mechanical, or thermal, photonic, ionic, electronic, Xrays, and so on and so forth) to physically, chemically, electronically deform the substrate's surface. Examples include nanoimprint lithography and local oxidation nanolithography.